采用过滤阴极真空弧法，制备了满足激光稳相加速机制要求的超薄自支撑类金刚石碳靶。室温下沉积，基片偏压为-32 V，薄膜沉积速率约为每脉冲0.002 nm。选取NaCl膜作脱膜剂，采用漂浮法进行脱膜。打捞板孔径为1 mm时，自支撑厚度范围为5~50 nm，自支撑成功率约为70%。利用拉曼光谱仪及原子力显微镜等仪器，测量了薄膜的结构、表面粗糙度等关键参数。

关键词

Abstract

Self-supporting diamond-like-carbon (DLC) films have been manufactured successfully using the filtered cathodic vacuum arc system, which are ideal targets for laser phase-stable acceleration regime. The film is deposited at room temperature with a -32 V substrate bias voltage. The deposition rate is about 0.002 nm per pulse. Practically, the NaCl is deposited first as a sacrificial layer before carbon deposition. A holder with round holes is used to support the DLC film after the NaCl layer is dissolved in the water. Films with thickness 5-50 nm can mount over the apertures with a diameter up to 1 mm and the success rate is about 70%. The structure and roughness of the film have been measured by the Raman spectrum and atomic force microscope.

补充资料

中图分类号：O484.5

DOI：10.3788/hplpb20132507.1723

所属栏目：ICF与激光等离子体

基金项目：国家自然科学基金项目(413142792;413142718)

收稿日期：2012-11-20

修改稿日期：2013-03-27

网络出版日期：--

作者单位    点击查看

祝娇：北京大学 核物理与核技术国家重点实验室, 北京 100871
符合振：北京大学 核物理与核技术国家重点实验室, 北京 100871
林晨：北京大学 核物理与核技术国家重点实验室, 北京 100871
高原：北京大学 核物理与核技术国家重点实验室, 北京 100871
赵栓：北京大学 核物理与核技术国家重点实验室, 北京 100871
朱昆：北京大学 核物理与核技术国家重点实验室, 北京 100871
陆元荣：北京大学 核物理与核技术国家重点实验室, 北京 100871
陈佳洱：北京大学 核物理与核技术国家重点实验室, 北京 100871
颜学庆：北京大学 核物理与核技术国家重点实验室, 北京 100871

联系人作者：祝娇(jiaozhu@pku.edu.cn)

备注：祝娇(1988-), 女，硕士研究生，从事激光加速靶材制备研究。

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引用该论文

Zhu Jiao,Fu Hezhen,Lin Chen,Gao Yuan,Zhao Shuan,Zhu Kun,Lu Yuanrong,Chen Jia'er,Yan Xueqing. Preparation of ultra-thin DLC target for laser ion acceleration[J]. High Power Laser and Particle Beams, 2013, 25(7): 1723-1726

祝娇,符合振,林晨,高原,赵栓,朱昆,陆元荣,陈佳洱,颜学庆. 激光加速实验超薄类金刚石碳靶的制备[J]. 强激光与粒子束, 2013, 25(7): 1723-1726

被引情况

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【3】吴慎将,王楠,苏俊宏,徐均琪,葛锦蔓,刘斌,郭淑玲. 横向电场下的类金刚石薄膜激光损伤. 强激光与粒子束, 2015, 27(9): 92003--1

【4】朱亚永,李成钰,耿易星,林晨,卢海洋,颜学庆. 实时单发测量的汤姆逊离子谱仪. 强激光与粒子束, 2015, 27(11): 112001--1

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